EPITAXIAL LIFT-OFF AND ITS APPLICATIONS

被引：71

作者：

DEMEESTER, P

POLLENTIER, I

DEDOBBELAERE, P

BRYS, C

VANDAELE, P

机构：

[1] Lab. of Electromagnetics and Acoust., Gent Univ.

来源：

SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 1993年 / 8卷 / 06期

关键词：

D O I：

10.1088/0268-1242/8/6/021

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In this paper we will give an overview of the epitaxial lift-off (ELO) technique and its applications. The first part will describe the basic technology, which includes chemical lift-off, handling, bonding, stress, alignment, etc. The second part will give an overview of device results obtained with ELO (LED and lasers on Si, MESFETS on InP, OEICS, etc).

引用

页码：1124 / 1135

页数：12

共 40 条

[1] BRIONES F, 1992, 1992 ESSDERC 92 LEUV
[2] GAAS/ALGAAS MULTIPLE-QUANTUM-WELL VERTICAL OPTICAL MODULATORS ON GLASS USING THE EPITAXIAL LIFT-OFF TECHNIQUE
BUYDENS, L
DEDOBBELAERE, P
DEMEESTER, P
POLLENTIER, I
VANDAELE, P
[J]. OPTICS LETTERS, 1991, 16 (12) : 916 - 918
[3] BUYDENS L, UNPUB
[4] ALIGNABLE EPITAXIAL LIFTOFF OF GAAS MATERIALS WITH SELECTIVE DEPOSITION USING POLYIMIDE DIAPHRAGMS
CAMPERIGINESTET, C
HARGIS, M
JOKERST, N
ALLEN, M
[J]. IEEE PHOTONICS TECHNOLOGY LETTERS, 1991, 3 (12) : 1123 - 1126
[5] GRAFTED SEMICONDUCTOR OPTOELECTRONICS
CHAN, WK
YIYAN, A
GMITTER, TJ
[J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1991, 27 (03) : 717 - 725
[6] CHANNEL GLASS WAVE-GUIDE DETECTORS WITH GRAFTED GAAS FILM IN EMBEDDED CONFIGURATION
CHAN, WK
YIYAN, A
GMITTER, TJ
FLOREZ, LT
ANDREADAKIS, N
NGUYEN, CK
[J]. ELECTRONICS LETTERS, 1991, 27 (05) : 410 - 412
[7] GAAS-BASED DIODE-LASERS ON SI WITH INCREASED LIFETIME OBTAINED BY USING STRAINED INGAAS ACTIVE LAYER
CHOI, HK
WANG, CA
KARAM, NH
[J]. APPLIED PHYSICS LETTERS, 1991, 59 (21) : 2634 - 2635
[8] COWIN M, UNPUB ELECTRON LETT
[9] DELL J, 1991, P ECOC IOOC 91 PARIS, P53
[10] RELAXED LATTICE-MISMATCHED GROWTH OF III-V SEMICONDUCTORS
DEMEESTER, P
ACKAERT, A
COUDENYS, G
MOERMAN, I
BUYDENS, L
POLLENTIER, I
VANDAELE, P
[J]. PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS, 1991, 22 (1-2): : 53 - 141

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