COMPARISON OF KINEMATIC X-RAY-DIFFRACTION AND BACKSCATTERING SPECTROMETRY - STRAIN AND DAMAGE PROFILES IN GARNET

被引：11

作者：

PAINE, BM ^{[1
]}

SPERIOSU, VS ^{[1
]}

WIELUNSKI, LS ^{[1
]}

GLASS, HL ^{[1
]}

NICOLET, MA ^{[1
]}

机构：

[1] ROCKWELL INT,CTR MICROELECTR RES & DEV,ANAHEIM,CA 92803

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH | 1981年 / 191卷 / 1-3期

关键词：

D O I：

10.1016/0029-554X(81)90987-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：80 / 86

页数：7

共 12 条

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[2]

Chu WK., 1978, BACKSCATTERING SPECT

[3]

Cullity B. D, 1956, ELEMENTS XRAY DIFFRA

[4]

EISEN FH, 1973, CHANNELING, pCH14

[5]

Feldman L, 1977, ION BEAM HDB MATERIA

[6]

FUKUHARA A, 1977, J APPL CRYSTALLOGR, V10, P387

[7] DETERMINATION OF LATTICE STRAIN IN PROTON-BOMBARDED REGIONS OF SINGLE-CRYSTAL GALLIUM-ARSENIDE, USING PRECISION X-RAY MEASUREMENTS [J].

HALLIWELL, MAG ;

HECKINGBOTTOM, R ;

HEMMENT, PLF .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1977, 10 (04) :L29-L31

[8] X-RAY STUDY OF LATTICE STRAIN IN BORON IMPLANTED LASER ANNEALED SILICON [J].

LARSON, BC ;

BARHORST, JF .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (06) :3181-3185

[9]

SPERIOSU V, UNPUB

[10] X-RAY DETERMINATION OF STRAIN AND DAMAGE DISTRIBUTIONS IN ION-IMPLANTED LAYERS [J].

SPERIOSU, VS ;

GLASS, HL ;

KOBAYASHI, T .

APPLIED PHYSICS LETTERS, 1979, 34 (09) :539-542

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