USE OF A 4-POINT PROBE FOR PROFILING SUB-MICRON LAYERS

被引：19

作者：

HUANG, RS

LADBROOKE, PH

机构：

来源：

SOLID-STATE ELECTRONICS | 1978年 / 21卷 / 09期

关键词：

D O I：

10.1016/0038-1101(78)90347-7

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1123 / &

共 12 条

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