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RHEED STUDIES OF GA DESORPTION FROM GAAS AND OF AS DESORPTION FROM SI-DOPED GAAS DURING GROWTH INTERRUPTION
被引:11
作者:
THIERRYMIEG, V
LARUELLE, F
ETIENNE, B
机构:
[1] Laboratoire de Microstructures et de Microélectronique (L2M), CNRS, F-92225 Bagneux Cedex
关键词:
D O I:
10.1016/0022-0248(93)90781-Q
中图分类号:
O7 [晶体学];
学科分类号:
0702 ;
070205 ;
0703 ;
080501 ;
摘要:
We obtain accurate measurements of Ga desorption rate under conditions of Knudsen evaporation between 600 and 630-degrees-C from (001) GaAs or AlAs using only RHEED. Within two monolayers from an AlAs interface the Ga desorption is reduced by a factor of 2.5-3. In another experiment we observe that a partial surface coverage of a GaAs surface by Si has no effect on Ga desorption but increases strongly the As desorption, leading accordingly to a lowering of the transition temperature to a Ga-rich surface.
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页码:1022 / 1024
页数:3
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