FABRICATION OF NANOMETER STRUCTURES USING STM

被引：59

作者：

WIESENDANGER, R

机构：

[1] Department of Physics, University of Basel, CH-4056 Basel

来源：

APPLIED SURFACE SCIENCE | 1992年 / 54卷

关键词：

D O I：

10.1016/0169-4332(92)90055-3

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The application of scanning tunneling microscopy (STM) to the fabrication of nanometer scale structures is reviewed. Representative examples are given rather than trying to present a complete overview of the surface modification procedures employed so far. The issues of writing speed as well as the ultimate decrease of the size of the written features are addressed. Nanometer scale surface modifications performed with STM-related scanned probe microscopes are also described.

引用

收藏

页码：271 / 277

页数：7

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