INSITU X-RAY CHEMICAL-ANALYSIS OF Y1BA2CU3O7-X FILMS BY REFLECTION-HIGH-ENERGY-ELECTRON-DIFFRACTION TOTAL-REFLECTION-ANGLE X-RAY SPECTROSCOPY

被引：13

作者：

KAMEI, M

AOKI, Y

USUI, T

MORISHITA, T

机构：

[1] Superconductivity Research Laboratory, ISTEC, Koto-ku, Tokyo, 135

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1992年 / 31卷 / 5A期

关键词：

RHEED; TRAXS; RHEED-TRAXS; Y-BA-CU-O FILM; CHEMICAL ANALYSIS; FLUORESCENT X-RAY ANALYSIS;

D O I：

10.1143/JJAP.31.1326

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Both the surface crystalline structure and chemical composition of Y-Ba-Cu-O film were examined in situ using reflection-high-energy-electron-diffraction and total-reflection-angle X-ray spectroscopy (RHEED-TRAXS). The chemical composition determined by TRAXS agreed well with that determined by inductively coupled plasma spectroscopy. The compositional deviation from Y1Ba2Cu3O7-x affected the surface crystalline structure of films, as was detected by RHEED and confirmed by scanning electron microscopy. RHEED-TRAXS is a powerful tool for in situ examination of the crystal growth of Y-Ba-Cu-O films.

引用

收藏

页码：1326 / 1328

页数：3

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