X-RAY CHEMICAL-ANALYSIS OF AN YBA2CU3OX THIN-FILM BY SCANNING ELECTRON-MICROSCOPY AND TOTAL-REFLECTION-ANGLE X-RAY SPECTROSCOPY (SEM-TRAXS)

Scanning electron microscopy and total-reflection-angle X-ray spectroscopy (SEM-TRAXS) were applied to X-ray chemical analysis of a 1000 angstrom-thick YBa2Cu3Ox (YBCO) film on an MgO substrate. The intensity of the characteristic X-rays emitted from the YBCO thin film varied as a function of the take-off angle (theta(t)) with respect to the film Surface. The intensity of higher-energy X-rays of BaL lines and CuK lines was almost constant against the theta(t) over the wide range of 0-degrees-30-degrees, but that of lower-energy, X-rays of YL(alpha), CuL(alpha) and OK(alpha) lines depends strongly on the theta(t) up to 10-degrees, and then slightly increases with the theta(t).