THE PREPARATION OF AMORPHOUS SI-H THIN-FILMS FOR OPTOELECTRONIC APPLICATIONS BY GLOW-DISCHARGE DISSOCIATION OF SIH4 USING A DIRECT-CURRENT SADDLE-FIELD PLASMA CHAMBER

被引:19
作者
KRUZELECKY, RV
ZUKOTYNSKI, S
UKAH, CI
GASPARI, F
PERZ, JM
机构
[1] UNIV TORONTO,DEPT ELECT ENGN,TORONTO M5S 1A4,ONTARIO,CANADA
[2] UNIV TORONTO,DEPT PHYS,TORONTO M5S 1A7,ONTARIO,CANADA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 04期
关键词
D O I
10.1116/1.575765
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:2632 / 2638
页数:7
相关论文
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