THE PREPARATION OF HYDROGENATED AMORPHOUS-SILICON BY PLASMA-ENHANCED REACTIVE EVAPORATION

被引：11

作者：

KRUZELECKY, RV

RACANSKY, D

ZUKOTYNSKI, S

GASPARI, F

UKAH, CI

PERZ, JM

机构：

[1] UNIV TORONTO,DEPT ELECT ENGN,TORONTO M5S 1A4,ONTARIO,CANADA

[2] UNIV TORONTO,DEPT PHYS,TORONTO M5S 1A7,ONTARIO,CANADA

来源：

JOURNAL OF NON-CRYSTALLINE SOLIDS | 1989年 / 108卷 / 01期

关键词：

D O I：

10.1016/0022-3093(89)90339-6

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：115 / 127

页数：13

共 39 条

[1] ACTIVATED REACTIVE EVAPORATION OF HYDROGENATED AMORPHOUS-SILICON
ANDERSON, JC
BISWAS, S
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 : 817 - 820
[2] DEFECT CREATION AND HYDROGEN EVOLUTION IN AMORPHOUS SI-H
BIEGELSEN, DK
STREET, RA
TSAI, CC
KNIGHTS, JC
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 285 - 290
[3] BRODSKY MH, 1977, PHYS REV B, V16, P3556, DOI 10.1103/PhysRevB.16.3556
[4] ELECTRON SPIN RESONANCE IN AMORPHOUS SILICON, GERMANIUM, AND SILICON CARBIDE
BRODSKY, MH
TITLE, RS
[J]. PHYSICAL REVIEW LETTERS, 1969, 23 (11) : 581 - &
[5] QUANTITATIVE-ANALYSIS OF HYDROGEN IN GLOW-DISCHARGE AMORPHOUS SILICON
BRODSKY, MH
FRISCH, MA
ZIEGLER, JF
LANFORD, WA
[J]. APPLIED PHYSICS LETTERS, 1977, 30 (11) : 561 - 563
[6] PREPARATION AND PROPERTIES OF AMORPHOUS SILICON
CHITTICK, RC
ALEXANDE.JH
STERLING, HF
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1969, 116 (01) : 77 - &
[7] LIGHT-INDUCED DANGLING BONDS IN HYDROGENATED AMORPHOUS-SILICON
DERSCH, H
STUKE, J
BEICHLER, J
[J]. APPLIED PHYSICS LETTERS, 1981, 38 (06) : 456 - 458
[8] A NEW EVAPORATION METHOD FOR PREPARING HYDROGENATED AMORPHOUS-SILICON FILMS
GRASSO, V
MEZZASALMA, AM
NERI, F
[J]. SOLID STATE COMMUNICATIONS, 1982, 41 (09) : 675 - 677
[9] MODIFICATIONS IN OPTOELECTRONIC BEHAVIOR OF PLASMA-DEPOSITED AMORPHOUS-SEMICONDUCTOR ALLOYS VIA IMPURITY INCORPORATION
GRIFFITH, RW
KAMPAS, FJ
VANIER, PE
HIRSCH, MD
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) : 391 - 396
[10] INTRINSIC STRESS MEASUREMENTS AS A QUANTITATIVE MEASURE OF THE GROWTH-MORPHOLOGY TRANSITION IN A-SI-H
HARBISON, JP
[J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 66 (1-2) : 87 - 92

← 1 2 3 4 →