CHEMICAL VAPOR-DEPOSITION OF COPPER FROM COPPER(I) TRIMETHYLPHOSPHINE COMPOUNDS

被引：74

作者：

HAMPDENSMITH, MJ

KODAS, TT

PAFFETT, M

FARR, JD

SHIN, HK

机构：

[1] UNIV NEW MEXICO,DEPT CHEM ENGN,ALBUQUERQUE,NM 87131

[2] UNIV CALIF LOS ALAMOS SCI LAB,LOS ALAMOS,NM 87545

来源：

CHEMISTRY OF MATERIALS | 1990年 / 2卷 / 06期

关键词：

D O I：

10.1021/cm00012a007

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：636 / 639

页数：4

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