HOW PERFECT IS A PERFECT CRYSTAL - PART-PER-BILLION LEVEL MOSAICITY MEASUREMENTS IN SILICON

被引：12

作者：

DEUTSCH, M ^{[1
]}

HART, M ^{[1
]}

CUMMINGS, S ^{[1
]}

机构：

[1] UNIV MANCHESTER, SCHUSTER LAB, MANCHESTER M13 9PL, LANCS, ENGLAND

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 18期

关键词：

D O I：

10.1063/1.98998

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1410 / 1412

页数：3

共 19 条

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