AN APERTURE-VALVE ASSEMBLY FOR CALIBRATED, REPETITIVE GAS DOSES

被引：5

作者：

COHEN, SM

DEVELYN, MP

机构：

[1] Department of Chemistry and Rice Quantum Institute, Rice University, Houston, Texas

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1991年 / 9卷 / 04期

关键词：

D O I：

10.1116/1.577291

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

[No abstract available]

引用

页码：2414 / 2417

页数：4

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