REFRACTIVE-INDEX OF HYDROGENATED AMORPHOUS-SILICON FILMS PREPARED BY GLOW-DISCHARGE BETWEEN 50-DEGREES-C AND 350-DEGREES-C

被引：8

作者：

BERGER, JM

FERRATON, JP

YOUS, B

DONNADIEU, A

机构：

来源：

THIN SOLID FILMS | 1981年 / 86卷 / 04期

关键词：

D O I：

10.1016/0040-6090(81)90341-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：337 / 345

页数：9

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