UNUSUAL ROOM-TEMPERATURE INTERMIXING AND OXIDATION IN COPPER DEPOSITED ON A FLUORINATED AMORPHOUS-SILICON SYSTEM

被引:10
作者
CYTERMANN, C [1 ]
BRENER, R [1 ]
SACHER, E [1 ]
PRATT, B [1 ]
WEIL, R [1 ]
机构
[1] TECHNION ISRAEL INST TECHNOL,DEPT PHYS,IL-32000 HAIFA,ISRAEL
关键词
D O I
10.1063/1.99516
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:191 / 193
页数:3
相关论文
共 25 条
  • [1] DRAGGING OF SMALL OXIDE PARTICLES BY MIGRATING GRAIN BOUNDARIES IN COPPER
    ASHBY, MF
    CENTAMORE, RM
    [J]. ACTA METALLURGICA, 1968, 16 (09): : 1081 - +
  • [2] XPS, AUGER STUDY OF CU3SI AND ITS REACTION WITH OXYGEN
    BANHOLZER, WF
    BURRELL, MC
    [J]. SURFACE SCIENCE, 1986, 176 (1-2) : 125 - 133
  • [3] ELECTRONIC PROPERTIES OF SILICON-TRANSITION METAL INTERFACE COMPOUNDS
    Calandra, C.
    Bisi, O.
    Ottaviani, G.
    [J]. SURFACE SCIENCE REPORTS, 1985, 4 (5-6) : 271 - 364
  • [4] MECHANISM OF GROWTH OF ULTRATHIN SIO2 LAYERS ON SILICIDE SUBSTRATES
    CROS, A
    [J]. SURFACE SCIENCE, 1985, 162 (1-3) : 702 - 707
  • [5] CROS A, 1986, J APPL PHYS, V57, P2253
  • [6] THERMAL-OXIDATION OF SILICIDES ON SILICON
    DHEURLE, FM
    CROS, A
    FRAMPTON, RD
    IRENE, EA
    [J]. PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1987, 55 (02): : 291 - 308
  • [7] FRANK TC, 1982, APPL SURF SCI, V14, P359
  • [8] INFRARED SPECTROSCOPIC STUDY OF METALS INTRUDED INTO A SILICA FRAMEWORK
    HONDA, F
    HIROKAWA, K
    KAJIURA, T
    [J]. SPECTROCHIMICA ACTA PART A-MOLECULAR SPECTROSCOPY, 1972, A 28 (09): : 1793 - &
  • [9] SILICIDE FORMATION BY THERMAL ANNEALING OF NI AND PD ON HYDROGENATED AMORPHOUS-SILICON FILMS
    HUNG, LS
    KENNEDY, EF
    PALMSTROM, CJ
    OLOWOLAFE, JO
    MAYER, JW
    RHODES, H
    [J]. APPLIED PHYSICS LETTERS, 1985, 47 (03) : 236 - 238
  • [10] REACTIONS BETWEEN TI AND AL FILMS ON A-SI-H
    ITO, T
    FUJIMURA, N
    NAKAYAMA, Y
    [J]. MATERIALS LETTERS, 1986, 4 (8-9) : 350 - 352