THE EFFICIENT SIMULATION OF COUPLED POINT-DEFECT AND IMPURITY DIFFUSION

被引:27
作者
KUMP, MR [1 ]
DUTTON, RW [1 ]
机构
[1] STANFORD UNIV,INTEGRATED CIRCUITS LAB,STANFORD,CA 94305
关键词
D O I
10.1109/43.3149
中图分类号
TP3 [计算技术、计算机技术];
学科分类号
0812 ;
摘要
引用
收藏
页码:191 / 204
页数:14
相关论文
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