STABILIZATION OF SILICON SURFACES USING SILICON NITRIDE

被引：6

作者：

KENDALL, EJM

机构：

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1968年 / 1卷 / 11期

关键词：

D O I：

10.1088/0022-3727/1/11/304

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1409 / &

共 29 条

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[7]

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[9]

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