COLLISION THEORIES OF CATHODE SPUTTERING OF METALS AT LOW ION ENERGIES

被引：12

作者：

HENSCHKE, EB

机构：

来源：

PHYSICAL REVIEW | 1961年 / 121卷 / 05期

关键词：

D O I：

10.1103/PhysRev.121.1286

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1286 / &

共 22 条

[1] THEORY OF THE SPUTTERING PROCESS
HARRISON, DE
[J]. PHYSICAL REVIEW, 1956, 102 (06): : 1473 - 1480
[2] NEW COLLISION THEORY OF CATHODE SPUTTERING OF METALS AT LOW ION ENERGIES
HENSCHKE, EB
[J]. PHYSICAL REVIEW, 1957, 106 (04): : 737 - 753
[3] DEPOSIT SPOT PATTERNS FROM LOW-INDEX PLANES OF METAL SINGLE CRYSTALS IN A NEW THEORY OF CATHODE SPUTTERING
HENSCHKE, EB
[J]. JOURNAL OF APPLIED PHYSICS, 1957, 28 (04) : 411 - 420
[4] HENSCHKE EB, 1955, UNPUBLISHED
[5] HENSCHKE EB, 1957, PHYS REV, V106, P752
[6] HENSCHKE EB, 1957, J APPL PHYS, V28, P416
[7] HENSCHKE EB, 1957, PHYS REV, V106, P738
[8] SPUTTERING OF SURFACES BY POSITIVE ION BEAMS OF LOW ENERGY
HONIG, RE
[J]. JOURNAL OF APPLIED PHYSICS, 1958, 29 (03) : 549 - 555
[9] ANALYSIS OF LOW-ENERGY SPUTTERING
LANGBERG, E
[J]. PHYSICAL REVIEW, 1958, 111 (01): : 91 - 97
[10] LANGBERG E, 1956, DISSERTATION