MECHANISMS OF POLYMER FILM DEPOSITION FROM RF DISCHARGES OF ACETYLENE, NITROGEN AND HELIUM MIXTURES

被引：71

作者：

DURRANT, SF ^{[1
]}

MARCAL, N ^{[1
]}

CASTRO, SG ^{[1
]}

VINHAS, RCG ^{[1
]}

DEMORAES, MAB ^{[1
]}

NICOLA, JH ^{[1
]}

机构：

[1] UNIV ESTADUAL CAMPINAS,INST FIS GLEB WATAGHIN,FIS SUPERFICIES GRP,BR-13083970 CAMPINAS,BRAZIL

来源：

THIN SOLID FILMS | 1995年 / 259卷 / 02期

关键词：

ACETYLENE; NITROGEN; OPTICAL SPECTROSCOPY; PLASMA PROCESSING AND DEPOSITION;

D O I：

10.1016/0040-6090(94)06439-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Mixtures of C2H2, He and N-2 were polymerized in an r.f. discharge. Quantitative optical emission spectroscopy was used to determine relative concentrations of the key species CH and CN in the plasma as a function of the proportions of monomer gases in the feed, and to delineate the behavior of the electron mean energy and number density in the discharge. Transmission IR spectroscopy (IRS) and electron spectroscopy for chemical analysis (ESCA) of films deposited from discharges containing different proportions of nitrogen revealed the incorporation of both CH and CN in the deposited material. Deposition rates were also determined and their connection with deposition mechanisms via gas-phase and surface reactions is outlined.

引用

页码：139 / 145

页数：7

共 25 条

[1] SURFACE MODIFICATION OF POLYETHYLENE BY REMOTE DC DISCHARGE PLASMA TREATMENT [J].

BEHNISCH, J ;

HOLLANDER, A ;

ZIMMERMANN, H .

JOURNAL OF APPLIED POLYMER SCIENCE, 1993, 49 (01) :117-124

[2] XPS SURFACE STUDIES OF INJECTION-MOLDED POLY(PHENYLENE ETHER)/NYLON 6,6 AND POLY(PHENYLENE ETHER)/HIPS BLENDS [J].

BHATIA, QS ;

BURRELL, MC ;

CHERA, JJ .

JOURNAL OF APPLIED POLYMER SCIENCE, 1992, 46 (11) :1915-1925

[3] OPTICAL-EMISSION SPECTROSCOPY OF REACTIVE PLASMAS - A METHOD FOR CORRELATING EMISSION INTENSITIES TO REACTIVE PARTICLE DENSITY [J].

COBURN, JW ;

CHEN, M .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (06) :3134-3136

[4] MECHANISMS OF ETCHING AND POLYMERIZATION IN RADIOFREQUENCY DISCHARGES OF CF4-H2,CF4-C2F4,C2F6-H2,C3F8-H2 [J].

DAGOSTINO, R ;

CRAMAROSSA, F ;

COLAPRICO, V ;

DETTOLE, R .

JOURNAL OF APPLIED PHYSICS, 1983, 54 (03) :1284-1288

[5] POLYMER FILM FORMATION IN C2F6-H2 DISCHARGES [J].

DAGOSTINO, R ;

CRAMAROSSA, F ;

FRACASSI, F ;

DESIMONI, E ;

SABBATINI, L ;

ZAMBONIN, PG ;

CAPORICCIO, G .

THIN SOLID FILMS, 1986, 143 (02) :163-175

[6] MECHANISMS OF DEPOSITION AND ETCHING OF THIN-FILMS OF PLASMA-POLYMERIZED FLUORINATED MONOMERS IN RADIOFREQUENCY DISCHARGES FED WITH C2F6-H2 AND C2F6-O2 MIXTURES [J].

DAGOSTINO, R ;

CRAMAROSSA, F ;

ILLUZZI, F .

JOURNAL OF APPLIED PHYSICS, 1987, 61 (08) :2754-2762

[7] EFFECT OF BIAS AND TEMPERATURE ON THE BULK AND SURFACE-PROPERTIES OF GOLD-CONTAINING PLASMA-POLYMERIZED FLUOROCARBONS [J].

DAGOSTINO, R ;

MARTINU, L ;

PISCHE, V .

PLASMA CHEMISTRY AND PLASMA PROCESSING, 1991, 11 (01) :1-13

[8] RELATIONSHIPS BETWEEN THE PLASMA ENVIRONMENT AND THE COMPOSITION AND OPTICAL-PROPERTIES OF PLASMA-POLYMERIZED THIN-FILMS PRODUCED IN RF DISCHARGES OF C2H2-SF6 MIXTURES [J].

DURRANT, SF ;

MOTA, RP ;

DEMORAES, MAB .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (01) :448-455

[9] FLUORINATED POLYMER-FILMS FROM RF PLASMAS CONTAINING BENZENE AND SULFUR HEXAFLUORINE [J].

DURRANT, SF ;

MOTA, RP ;

DEMORAES, MAB .

THIN SOLID FILMS, 1992, 220 (1-2) :295-302

[10]

DURRANT SF, 1991, 1991 P BRAZ POLYM C, P510

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