STRUCTURE OF INTERFACES IN AMORPHOUS-SILICON SILICON-NITRIDE SUPERLATTICES DETERMINED BY INSITU OPTICAL REFLECTANCE

被引：15

作者：

YANG, L ^{[1
]}

ABELES, B ^{[1
]}

PERSANS, PD ^{[1
]}

机构：

[1] EXXON RES & ENGN CO,ANNANDALE,NJ 08801

来源：

APPLIED PHYSICS LETTERS | 1986年 / 49卷 / 11期

关键词：

D O I：

10.1063/1.97062

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：631 / 633

页数：3

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