AN IMPROVED METHOD OF TRIMETHYLINDIUM TRANSPORT FOR THE GROWTH OF INDIUM-PHOSPHIDE AND RELATED ALLOYS BY MOVPE

被引:15
作者
GERRARD, ND
SMITH, LM
JONES, AC
BOSNELL, J
机构
[1] EPICHEM LTD,WIRRAL L62 3QF,MERSEYSIDE,ENGLAND
[2] ROYAL SIGNALS & RADAR ESTAB,DIV ELECTR,DRA,MALVERN WR14 3PS,WORCS,ENGLAND
关键词
D O I
10.1016/0022-0248(92)90161-B
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
The mass transport of the volatile solids tertiarybutanol and trimethylindium has been studied quantitatively and qualitatively using glass "bubblers". This was then used to devise an optimized dual bubbler system for the improved transport of trimethylindium in the growth of indium phosphide and related alloys by MOVPE.
引用
收藏
页码:500 / 506
页数:7
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