PROPERTIES OF REACTIVELY SPUTTERED MO1-XOX FILMS

被引：16

作者：

SO, FCT ^{[1
]}

KOLAWA, E ^{[1
]}

NIEH, SCW ^{[1
]}

ZHAO, XA ^{[1
]}

NICOLET, MA ^{[1
]}

机构：

[1] CALTECH, PASADENA, CA 91125 USA

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1988年 / 45卷 / 04期

关键词：

D O I：

10.1007/BF00617930

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：265 / 270

页数：6

共 22 条

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