RF SPUTTERED ALUMINUM OXIDE FILMS ON SILICON

被引：59

作者：

SALAMA, CAT

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1970年 / 117卷 / 07期

关键词：

D O I：

10.1149/1.2407682

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：913 / &

共 33 条

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[19] AL2O3-SILICON MOS FIELD EFFECT TRANSISTORS [J].

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[20]

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