AES AND XPS OF SILICON-NITRIDE FILMS OF VARYING REFRACTIVE-INDEXES

被引：69

作者：

WITTBERG, TN

HOENIGMAN, JR

MODDEMAN, WE

COTHERN, CR

GULETT, MR

机构：

[1] UNIV DAYTON,DEPT PHYS,DAYTON,OH 45469

[2] NCR CORP,DIV MICROELECTRON,MIAMISBURG,OH 45342

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 02期

关键词：

D O I：

10.1116/1.569544

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：348 / 352

页数：5

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