INTERFACIAL POLARIZATION IN AL-Y2O3-SIO2-SI CAPACITOR

被引:4
作者
LING, CH
机构
[1] National Univ of Singapore, Kent Ridge Singapore, Singapore
关键词
CAPACITORS; DIELECTRIC MATERIALS;
D O I
10.1049/el:19931115
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The variation by a factor of 2 in the observed permittivity of yttrium oxide film is explained in terms of interfacial polarisation based on the Y2O3/SiO2 double-layer model. Provided the dielectric relaxation time constants of the two layers are grossly dissimilar, the model can also explain the frequency independence of the composite capacitor.
引用
收藏
页码:1676 / 1678
页数:3
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