HIGH-PERFORMANCE DOUBLE-DOPED INALAS/INGAAS/INP HETEROJUNCTION FET WITH POTENTIAL FOR MILLIMETER-WAVE POWER APPLICATIONS

被引:9
作者
IWATA, N
TOMITA, M
KUZUHARA, M
机构
[1] Kansai Electronics Research Laboratory, NEC Corporation, Otsu, Shiga 520, 9-1
关键词
FIELD-EFFECT TRANSISTORS; TRANSISTORS; SEMICONDUCTOR DEVICES AND MATERIALS;
D O I
10.1049/el:19930420
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Lattice matched InAlAs/InGaAs/InP heterojunction field-effect transistors (HJFETs), which have carrier supplying layers on and beneath the undoped InGaAs channel layer, have been successfully fabricated. A selective recess of the InGaAs channel edge at a mesa sidewall together with the use of a wide recess gate structure leads to a 5.7 V gate-drain breakdown voltage without kink effects. The fabricated HJFET with a 0-15 x 100 mum2 T-shaped gate exhibits a 700 mA/mm maximum drain current, a voltage gain of 14, and a 345 GHz maximum frequency of oscillation.
引用
收藏
页码:628 / 629
页数:2
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