THE EFFECTS OF ION-IMPLANTATION ON THE ELECTRICAL-PROPERTIES OF AMORPHOUS-SILICON

被引:85
作者
KALBITZER, S
MULLER, G
LECOMBER, PG
SPEAR, WE
机构
来源
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1980年 / 41卷 / 04期
关键词
D O I
10.1080/13642818008245398
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:439 / 456
页数:18
相关论文
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