NEW DIMENSIONS IN ATOM-PROBE ANALYSIS

被引：14

作者：

CEREZO, A ^{[1
]}

HYDE, JM ^{[1
]}

MILLER, MK ^{[1
]}

BEVERINI, G ^{[1
]}

SETNA, RP ^{[1
]}

WARREN, PJ ^{[1
]}

SMITH, GDW ^{[1
]}

机构：

[1] OAK RIDGE NATL LAB,DIV MET & CERAM,OAK RIDGE,TN 37831

来源：

SURFACE SCIENCE | 1992年 / 266卷 / 1-3期

关键词：

D O I：

10.1016/0039-6028(92)91064-I

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

A new class of atom-probe instruments has recently been developed which combine single atom sensitivity mass spectrometry with position sensing, and have the potential of reconstructing nanometre-scale composition variations in three-dimensions. These techniques will be very powerful in the study of the early stages of phase transformations, and surface and interface segregation. Some recent results obtained with the first of these instruments, the position-sensitive atom probe, are described. Difficulties arise in this instrument when more than one ion is evaporated from the analysis area on a single field evaporation pulse, which can limit the accuracy of analysis performed on the resultant data. Other three-dimensional atom-probe instruments currently under development are described, and their expected performance in this respect is discussed. The significance of defining composition on the sub-nanometre scale is addressed, and the importance of atomic-scale modelling of the phenomena under investigation is indicated.

引用

页码：481 / 493

页数：13

共 29 条

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