LARGE-AREA DEPOSITION OF THIN-FILMS BY UV PULSED-LASER ABLATION

被引:12
作者
CORRERA, L
NICOLETTI, S
机构
[1] CNR-Istituto LAMEL, I-40129 Bologna
来源
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY | 1995年 / 32卷 / 1-2期
关键词
THIN FILMS; LAYER STRUCTURES; LASER PROCESSING;
D O I
10.1016/0921-5107(94)01158-3
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The pulsed laser ablation technique is a well-proved tool for deposition of multi-component materials such as ceramic superconductors, electro-optic or ferromagnetic oxides and other compounds of great interest for materials science and technology. As the capabilities of this technique have been demonstrated for film deposition over a small area, study of the uniformity, stoichiometry, and properties of films grown on a relatively large surface is relevant today, especially in view of possible industrial applications of pulsed laser deposition. This paper describes a multi-target laser system which is designed for the deposition of thin films over a surface of up to 50 mm in diameter, and reports results obtained for oxides and high temperature superconductors grown on crystalline substrates.
引用
收藏
页码:33 / 38
页数:6
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