DEMONSTRATION OF A NEW TOOL FOR DEGRADATION OF AMORPHOUS HYDROGENATED SILICON AND THE IMPORTANCE OF THE FERMI LEVEL SHIFT

被引:6
作者
KOCKA, J
STIKA, O
KLIMA, O
机构
关键词
D O I
10.1063/1.109602
中图分类号
O59 [应用物理学];
学科分类号
摘要
We introduce the pulsed Ruby laser as a new efficient degradation tool for amorphous hydrogenated silicon (a-Si:H). We present the degradation dynamics and the saturated values of the density of states (DOS) and the room temperature conductivity. Comparison of two samples with different impurity content indicates the impurity-related initial Fermi level shift. By a simple model we illustrate the influence of this shift on the initial stage of degradation (its acceleration or delay) and consequently, also on the saturated DOS.
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页码:1082 / 1084
页数:3
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