ORGANIC SOLUTIONS OF TRIPHENYLPHOSPHINE GOLD COMPLEXES - ATTRACTIVE NEW CANDIDATES FOR GOLD DEPOSITION

Organic solutions of triphenylphosphine gold(I) complexes are attractive precursors for effective laser direct writing. Under optimized conditions, gold lines of appropriate morphology and electrical resistivities between 9 and 22 muOMEGA cm are deposited at low powers and writing speeds significantly higher than those typical for laser chemical vapour deposition. The poor adhesion of the lines, which is a consequence of low deposition temperature, can be improved by increasing the scanning speed. It is shown that deposition from liquid precursors offers a straightforward way to convert the obvious advantages of the high precursor concentration into economic writing speeds.