DISTRIBUTED FEEDBACK LASER ARRAYS FABRICATED BY SYNCHROTRON ORBITAL RADIATION LITHOGRAPHY

被引:30
作者
NAKAO, M
SATO, K
NISHIDA, T
TAMAMURA, T
机构
[1] Opto-Electronics Laboratories, Nippon Telegraph and Telephone Corporation, Atsugi
关键词
D O I
10.1109/49.57824
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Twenty-wavelength integrated distributed feedback (DFB) laser arrays fabricated using synchrotron orbital radiation (SOR) lithography are demonstrated. All 20 DFB lasers on chip operated in a single-longitudinal mode, and their wavelengths are varied in accordance with grating periodicity. © 1990 IEEE
引用
收藏
页码:1178 / 1182
页数:5
相关论文
共 9 条
  • [1] EXTREMELY NARROW LINEWIDTH (APPROXIMATELY 1-MHZ) AND HIGH-POWER DFB LASERS GROWN BY MOVPE
    KONDO, Y
    SATO, K
    NAKAO, M
    FUKUDA, M
    OE, K
    [J]. ELECTRONICS LETTERS, 1989, 25 (03) : 175 - 177
  • [2] 1.55 MU-M DFB LASER ARRAY WITH LAMBDA-4-SHIFTED 1ST-ORDER GRATINGS FABRICATED BY X-RAY-LITHOGRAPHY
    NAKAO, M
    SATO, K
    NISHIDA, T
    TAMAMURA, T
    OZAWA, A
    SAITO, Y
    OKADA, I
    YOSHIHARA, H
    [J]. ELECTRONICS LETTERS, 1989, 25 (02) : 148 - 149
  • [3] OPTICAL FDM TRANSMISSION TECHNIQUE
    NOSU, K
    TOBA, H
    IWASHITA, K
    [J]. JOURNAL OF LIGHTWAVE TECHNOLOGY, 1987, 5 (09) : 1301 - 1308
  • [4] 5-WAVELENGTH INTEGRATED DFB LASER ARRAYS WITH QUARTER-WAVE-SHIFTED STRUCTURES
    OKUDA, H
    HIRAYAMA, Y
    FURUYAMA, H
    KINOSHITA, J
    NAKAMURA, M
    [J]. IEEE JOURNAL OF QUANTUM ELECTRONICS, 1987, 23 (06) : 843 - 848
  • [5] SHIBAYAMA A, 1988, ADHOC M SRI88 TSUKUB
  • [6] NOVEL FABRICATION METHOD OF QUARTER-WAVE-SHIFTED GRATINGS USING ECR-CVD SINX FILMS
    SUGIMOTO, H
    ABE, Y
    MATSUI, T
    OGATA, H
    [J]. ELECTRONICS LETTERS, 1987, 23 (24) : 1260 - 1261
  • [7] TAKATO N, 1988, J LIGHTWAVE TECHNOL, V6, P1303
  • [8] Yasaka H., 1989, IEEE Photonics Technology Letters, V1, P75, DOI 10.1109/68.87907
  • [9] BROAD WAVELENGTH TUNING UNDER SINGLE-MODE OSCILLATION WITH A MULTIELECTRODE DISTRIBUTED FEEDBACK LASER
    YOSHIKUNI, Y
    OE, K
    MOTOSUGI, G
    MATSUOKA, T
    [J]. ELECTRONICS LETTERS, 1986, 22 (22) : 1153 - 1154