THE FIELD SOLUTIONS FOR MULTIPOLE ELECTROSTATIC DEFLECTORS

被引：2

作者：

JIANG, XR

NA, ZF

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1987年 / 5卷 / 01期

关键词：

D O I：

10.1116/1.583852

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：156 / 160

页数：5

共 8 条

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[3]

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[5] A HIGH-CURRENT, HIGH-SPEED ELECTRON-BEAM LITHOGRAPHY COLUMN [J].

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[6] A LARGE-ANGLE ELECTROSTATIC DEFLECTION, VARIABLE SHAPED, ELECTRON-BEAM EXPOSURE SYSTEM [J].

MORIYA, S ;

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[7]

MUNRO E, 1982, OPTIK, V61, P1

[8] AUTOMATIC-MEASUREMENT AND CORRECTION OF DEFLECTION ASTIGMATISM AND DEFOCUSING IN THE HEWLETT-PACKARD-605 ELECTRON-BEAM LITHOGRAPHY SYSTEM [J].

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