HIGH-RESOLUTION RUTHERFORD BACKSCATTERING SPECTROMETRY OF METAL SILICON INTERFACES

被引:12
作者
VANDERVEEN, JF
VANLOENEN, EJ
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D O I
10.1016/0039-6028(86)90902-7
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:701 / 712
页数:12
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