THE RELATIONSHIP BETWEEN RESIDUAL-STRESS, X-RAY ELASTIC-CONSTANTS AND LATTICE-PARAMETERS IN TIN FILMS MADE BY PHYSICAL VAPOR-DEPOSITION

被引：58

作者：

PERRY, AJ

机构：

来源：

THIN SOLID FILMS | 1989年 / 170卷 / 01期

关键词：

D O I：

10.1016/0040-6090(89)90622-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：63 / 70

页数：8

共 16 条

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