THEORETICALLY PREDICTED AND EXPERIMENTALLY DETERMINED EFFECTS OF THE SI/(SI + C) GAS-PHASE RATIO ON THE GROWTH AND CHARACTER OF MONOCRYSTALLINE BETA SILICON-CARBIDE FILMS

被引：32

作者：

KIM, HJ

DAVIS, RF

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1986年 / 60卷 / 08期

关键词：

D O I：

10.1063/1.337075

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：2897 / 2903

页数：7

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