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SEMICONDUCTOR MECHANICAL SENSORS

被引：13
作者：
WORTMAN, JJ
MONTEITH, LK
机构：
[1] Research Triangle Institute, Research Triangle Park, N.C
[2] North Carolina State University, Raleigh, N. C.
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1969年 / ED16卷 / 10期
关键词：
D O I：
10.1109/T-ED.1969.16869
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The purpose of this paper is to briefly review the concepts proposed to explain the piezojunction effect and to describe the techniques employed in its application. Several experimental transducers which have been constructed and evaluated are described. © 1969 IEEE. All rights reserved.
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页码：855 / &
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