NUMERICAL STUDY OF EFFECT OF FABRICATION DAMAGE ON CARRIER DYNAMICS IN MQW NARROW WIRES

被引:1
作者
ENDOH, A
ARIMOTO, H
MUTO, S
机构
[1] Fujitsu Laboratories Ltd, Atsugi
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1993年 / 32卷 / 1B期
关键词
MQW NARROW WIRE; DAMAGE; NUMERICAL CALCULATION; CARRIER; RECOVERY TIME; DEAD LAYER; EFFECTIVE WIRE WIDTH;
D O I
10.1143/JJAP.32.552
中图分类号
O59 [应用物理学];
学科分类号
摘要
To clarify the dependence of the exciton absorption recovery time on wire width in multiple quantum well (MQW) narrow wires, we performed numerical calculations using a simple model with damage effects. The drastic reduction in recovery time for heavily damaged wires is attributed to the formation of a ''dead layer'', in which carriers vanish almost immediately, near the sidewalls. For lighter damage, the recovery time curve shifts downward with increasing damage as if surface recombination velocity had been increased. The carrier density profile for lighter damage indicates that the optical nonlinearity is not degraded for light damage although the recovery time is reduced.
引用
收藏
页码:552 / 555
页数:4
相关论文
共 10 条
[1]  
Crank J., 1979, MATH DIFFUSION, V2nd
[2]  
IDE Y, 1990, I PHYS C SER, V106, P495
[3]   GAAS-ALAS MONOLITHIC MICRORESONATOR ARRAYS [J].
JEWELL, JL ;
SCHERER, A ;
MCCALL, SL ;
GOSSARD, AC ;
ENGLISH, JH .
APPLIED PHYSICS LETTERS, 1987, 51 (02) :94-96
[4]   FABRICATION OF SUB-100-NM WIRES AND DOTS IN GAAS/ALGAAS MULTIQUANTUM WELL USING FOCUSED ION-BEAM LITHOGRAPHY [J].
KITADA, H ;
ARIMOTO, H ;
TACKEUCHI, A ;
YAMAGUCHI, Y ;
NAKATA, Y ;
ENDOH, A ;
MUTO, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1992, 31 (7B) :L990-L991
[5]   LOW-ENERGY FOCUSED ION-BEAM SYSTEM AND APPLICATION TO LOW DAMAGE MICROPROCESS [J].
KOSUGI, T ;
MIMURA, R ;
AIHARA, R ;
GAMO, K ;
NAMBA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (10) :2295-2298
[6]   SPEED AND EFFECTIVENESS OF WINDOWLESS GAAS ETALONS AS OPTICAL LOGIC GATES [J].
LEE, YH ;
GIBBS, HM ;
JEWELL, JL ;
DUFFY, JF ;
VENKATESAN, T ;
GOSSARD, AC ;
WIEGMANN, W ;
ENGLISH, JH .
APPLIED PHYSICS LETTERS, 1986, 49 (09) :486-488
[7]   TIME RESOLVED SPECTROSCOPY ON ETCHED GAAS/GAALAS-QUANTUM-MICROSTRUCTURES [J].
MAYER, G ;
MAILE, BE ;
GERMANN, R ;
FORCHEL, A ;
MEIER, HP .
SUPERLATTICES AND MICROSTRUCTURES, 1989, 5 (04) :579-582
[8]   TIME-RESOLVED INVESTIGATIONS OF SIDEWALL RECOMBINATION IN DRY-ETCHED GAAS WIRES [J].
MAYER, G ;
MAILE, BE ;
GERMANN, R ;
FORCHEL, A ;
GRAMBOW, P ;
MEIER, HP .
APPLIED PHYSICS LETTERS, 1990, 56 (20) :2016-2018
[9]   PICOSECOND EXCITONIC ABSORPTION RECOVERY OF 100 NM GAAS/ALGAAS NARROW MULTIPLE QUANTUM-WELL WIRES [J].
TACKEUCHI, A ;
KITADA, H ;
ARIMOTO, H ;
SUGIYAMA, Y ;
ENDOH, A ;
NAKATA, Y ;
INATA, T ;
MUTO, S .
APPLIED PHYSICS LETTERS, 1991, 59 (09) :1114-1116
[10]   CHARACTERIZATION OF SUBSURFACE DAMAGE IN GAAS PROCESSED BY GA+ FOCUSED ION-BEAM-ASSISTED CL-2 ETCHING USING PHOTOLUMINESCENCE [J].
TANEYA, M ;
SUGIMOTO, Y ;
AKITA, K .
JOURNAL OF APPLIED PHYSICS, 1989, 66 (03) :1375-1381