SILICON AS A MECHANICAL MATERIAL

[101] TENSILE PROPERTIES OF THIN, EVAPORATED GOLD FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (06) : 1096 - 1101

[102] MINIATURIZATION OF TUNING FORKS [J]. SCIENCE, 1968, 161 (3848) : 1320 - +

[103] CHEMICAL VAPOR-DEPOSITION OF SINGLE CRYSTALLINE BETA-SIC FILMS ON SILICON SUBSTRATE WITH SPUTTERED SIC INTERMEDIATE LAYER [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (12) : 2674 - 2680

[104] ONEILL P, 1980, HEWLETT PACKARD MAY, P12

[105] DEFORMATION AND FRACTURE OF SMALL SILICON CRYSTALS [J]. ACTA METALLURGICA, 1957, 5 (04): : 181 - 191

[106] YOUNGS MODULUS MEASUREMENTS OF THIN-FILMS USING MICROMECHANICS [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) : 6761 - 6766

[107] DYNAMIC MICROMECHANICS ON SILICON - TECHNIQUES AND DEVICES [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1241 - 1250

[108] SILICON TORSIONAL SCANNING MIRROR [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (05) : 631 - 637

[109] FABRICATION OF AN INTEGRATED, PLANAR SILICON INK-JET STRUCTURE [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) : 1918 - 1920

[110] MICROMECHANICAL LIGHT-MODULATOR ARRAY FABRICATED ON SILICON [J]. APPLIED PHYSICS LETTERS, 1977, 31 (08) : 521 - 523

[101] TENSILE PROPERTIES OF THIN, EVAPORATED GOLD FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1960, 31 (06) : 1096 - 1101

[102] MINIATURIZATION OF TUNING FORKS [J]. SCIENCE, 1968, 161 (3848) : 1320 - +

[103] CHEMICAL VAPOR-DEPOSITION OF SINGLE CRYSTALLINE BETA-SIC FILMS ON SILICON SUBSTRATE WITH SPUTTERED SIC INTERMEDIATE LAYER [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1980, 127 (12) : 2674 - 2680

[104] ONEILL P, 1980, HEWLETT PACKARD MAY, P12

[105] DEFORMATION AND FRACTURE OF SMALL SILICON CRYSTALS [J]. ACTA METALLURGICA, 1957, 5 (04): : 181 - 191

[106] YOUNGS MODULUS MEASUREMENTS OF THIN-FILMS USING MICROMECHANICS [J]. JOURNAL OF APPLIED PHYSICS, 1979, 50 (11) : 6761 - 6766

[107] DYNAMIC MICROMECHANICS ON SILICON - TECHNIQUES AND DEVICES [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1978, 25 (10) : 1241 - 1250

[108] SILICON TORSIONAL SCANNING MIRROR [J]. IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1980, 24 (05) : 631 - 637

[109] FABRICATION OF AN INTEGRATED, PLANAR SILICON INK-JET STRUCTURE [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) : 1918 - 1920

[110] MICROMECHANICAL LIGHT-MODULATOR ARRAY FABRICATED ON SILICON [J]. APPLIED PHYSICS LETTERS, 1977, 31 (08) : 521 - 523