SILICON AS A MECHANICAL MATERIAL

[141] INVESTIGATION OF THE APPLICATION OF POROUS SILICON LAYERS TO THE DIELECTRIC ISOLATION OF INTEGRATED-CIRCUITS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (05) : 870 - 874

[142] Terry S.C., 1975, THESIS STANFORD U ST

[143] GAS-CHROMATOGRAPHIC AIR ANALYZER FABRICATED ON A SILICON-WAFER [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) : 1880 - 1886

[144] THEUNISSEN MJJ, 1971, J ELECTROCHEM SOC, V118, P437

[145] MIRROR-MATRIX TUBE - NOVEL LIGHT VALVE FOR PROJECTION DISPLAYS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, 22 (09) : 765 - 775

[146] PHOTOSENSITIVE FIELD-EMISSION FROM SILICON POINT ARRAYS [J]. APPLIED PHYSICS LETTERS, 1972, 21 (08) : 384 - +

[147] FABRICATION AND SOME APPLICATIONS OF LARGE-AREA SILICON FIELD-EMISSION ARRAYS [J]. SOLID-STATE ELECTRONICS, 1974, 17 (02) : 155 - +

[148] TIMESHENKO SP, 1972, MECH MATER, P516

[149] OPTICAL-WAVEGUIDES FABRICATED BY PREFERENTIAL ETCHING [J]. APPLIED OPTICS, 1975, 14 (05): : 1200 - 1206

[150] PREFERENTIALLY ETCHED DIFFRACTION GRATINGS IN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (05) : 2163 - 2166

[141] INVESTIGATION OF THE APPLICATION OF POROUS SILICON LAYERS TO THE DIELECTRIC ISOLATION OF INTEGRATED-CIRCUITS [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (05) : 870 - 874

[142] Terry S.C., 1975, THESIS STANFORD U ST

[143] GAS-CHROMATOGRAPHIC AIR ANALYZER FABRICATED ON A SILICON-WAFER [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (12) : 1880 - 1886

[144] THEUNISSEN MJJ, 1971, J ELECTROCHEM SOC, V118, P437

[145] MIRROR-MATRIX TUBE - NOVEL LIGHT VALVE FOR PROJECTION DISPLAYS [J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1975, 22 (09) : 765 - 775

[146] PHOTOSENSITIVE FIELD-EMISSION FROM SILICON POINT ARRAYS [J]. APPLIED PHYSICS LETTERS, 1972, 21 (08) : 384 - +

[147] FABRICATION AND SOME APPLICATIONS OF LARGE-AREA SILICON FIELD-EMISSION ARRAYS [J]. SOLID-STATE ELECTRONICS, 1974, 17 (02) : 155 - +

[148] TIMESHENKO SP, 1972, MECH MATER, P516

[149] OPTICAL-WAVEGUIDES FABRICATED BY PREFERENTIAL ETCHING [J]. APPLIED OPTICS, 1975, 14 (05): : 1200 - 1206

[150] PREFERENTIALLY ETCHED DIFFRACTION GRATINGS IN SILICON [J]. JOURNAL OF APPLIED PHYSICS, 1975, 46 (05) : 2163 - 2166