PREFERENTIALLY ETCHED DIFFRACTION GRATINGS IN SILICON

[1] THIN-FILM LASER-TO-FIBER COUPLER [J]. APPLIED OPTICS, 1974, 13 (02): : 391 - 395

[2] COHEN RA, 1973, 197338 MIT LINC LAB

[3] SELECTIVELY ETCHED DIFFRACTION GRATINGS IN GAAS [J]. APPLIED PHYSICS LETTERS, 1974, 25 (04) : 208 - 210

[4] GRATING COUPLER FOR EFFICIENT EXCITATION OF OPTICAL GUIDED WAVES IN THIN FILMS [J]. APPLIED PHYSICS LETTERS, 1970, 16 (12) : 523 - +

[5] A WATER-AMINE-COMPLEXING AGENT SYSTEM FOR ETCHING SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (09) : 965 - &

[6] GRATING FILTERS FOR THIN-FILM OPTICAL-WAVEGUIDES [J]. APPLIED PHYSICS LETTERS, 1974, 24 (04) : 194 - 196

[7] JOSEPHSON TUNNELING THROUGH LOCALLY THINNED SILICON WAFERS [J]. APPLIED PHYSICS LETTERS, 1974, 25 (12) : 753 - 756

[8] SELECTIVE ETCHING OF GALLIUM ARSENIDE CRYSTALS IN H2SO4-H2O2-H2O SYSTEM [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (05) : 768 - &

[9] Pennington K. S., 1971, Optics Communications, V3, P357, DOI 10.1016/0030-4018(71)90108-8

[10] ROSENFELD RC, 1972, ULTRASONICS S P, P186

[1] THIN-FILM LASER-TO-FIBER COUPLER [J]. APPLIED OPTICS, 1974, 13 (02): : 391 - 395

[2] COHEN RA, 1973, 197338 MIT LINC LAB

[3] SELECTIVELY ETCHED DIFFRACTION GRATINGS IN GAAS [J]. APPLIED PHYSICS LETTERS, 1974, 25 (04) : 208 - 210

[4] GRATING COUPLER FOR EFFICIENT EXCITATION OF OPTICAL GUIDED WAVES IN THIN FILMS [J]. APPLIED PHYSICS LETTERS, 1970, 16 (12) : 523 - +

[5] A WATER-AMINE-COMPLEXING AGENT SYSTEM FOR ETCHING SILICON [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1967, 114 (09) : 965 - &

[6] GRATING FILTERS FOR THIN-FILM OPTICAL-WAVEGUIDES [J]. APPLIED PHYSICS LETTERS, 1974, 24 (04) : 194 - 196

[7] JOSEPHSON TUNNELING THROUGH LOCALLY THINNED SILICON WAFERS [J]. APPLIED PHYSICS LETTERS, 1974, 25 (12) : 753 - 756

[8] SELECTIVE ETCHING OF GALLIUM ARSENIDE CRYSTALS IN H2SO4-H2O2-H2O SYSTEM [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (05) : 768 - &

[9] Pennington K. S., 1971, Optics Communications, V3, P357, DOI 10.1016/0030-4018(71)90108-8

[10] ROSENFELD RC, 1972, ULTRASONICS S P, P186