SOURCES OF CONTAMINATION IN ELECTRON-OPTICAL EQUIPMENT

被引：39

作者：

LOVE, G ^{[1
]}

SCOTT, VD ^{[1
]}

DENNIS, NMT ^{[1
]}

LAURENSON, L ^{[1
]}

机构：

[1] EDWARDS HIGH VACUUM INT,CRAWLEY,W SUSSEX,ENGLAND

来源：

SCANNING | 1981年 / 4卷 / 01期

关键词：

D O I：

10.1002/sca.4950040105

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

收藏

页码：32 / 39

页数：8

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