DIFFERENTIAL PHASE QUADRATURE SURFACE PROFILING INTERFEROMETER

被引：13

作者：

OMAR, BA

HOLLOWAY, AJ

EMMONY, DC

机构：

[1] Loughborough University of Technology, Physics Department

来源：

APPLIED OPTICS | 1990年 / 29卷 / 31期

关键词：

D O I：

10.1364/AO.29.004715

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper describes an optical surface profiling system based on phase quadrature differential interferometry. The optical path difference between two adjacent optical probe beams is measured. Interference phase calculation and sample scanning is controlled by a PC computer. Height sensitivity is of the order of 1 nm and lateral resolution is ˜10 μm. Results are given which demonstrate the reproducibility and stability of the system. © 1990 Optical Society of America.

引用

页码：4715 / 4719

页数：5

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