ADSORPTION STATES AND GA DEPLETION DURING OXYGEN-ADSORPTION ON CLEAN POLAR GAAS SURFACES

Ultraviolet photoelectron spectroscopy (UPS), thermal desorption spectroscopy (TDS) and Auger (AES) measurements were used to study oxygen adsorption on sputtered an annealed GaAs(111)Ga, (1̄1̄1̄)As, and (100) surfaces. Two forms of adsorbed oxygen are seen in UPS. One of them is associatively bound and desorbs at 400-550 K mainly as molecular O2. It is most probably bound to surface As atoms as indicated by the small amounts of AsO which desorb simultaneously. The second form is atomic oxygen bound in an oxidic environment. It desorbs at 720-850 K in the form of Ga2O. Electron irradiation of the associatively bound oxygen transforms it into the oxidic form. This explains the mechanism of the known stimulating effect of low energy electrons on the oxidation of these surfaces. During oxygen exposure a Ga depletion occurs at the surface which indicates that oxygen adsorption is a more complex phenomenon then is usually assumed. The following model for oxygen adsorption is proposed: oxygen impinges on the surface, removes Ga atoms and thus creates sites which are capable of adsorbing molecular oxygen on As atoms of the second layer and are surrounded by Ga atoms of the first layer. This molecular oxygen is stable and simultaneously forms the precursor state for the dissociation to the oxidic form. © 1979.