共 26 条
- [1] Chang T. P., 1978, IBM Technical Disclosure Bulletin, V20, P3809
- [3] PROXIMITY EFFECT IN ELECTRON-BEAM LITHOGRAPHY [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1271 - 1275
- [4] CHANG THP, 1976, 7TH P INT C EL ION B, P377
- [5] CHANG THP, 1976, 7TH P INT C EL ION B, P392
- [9] GROBMAN WD, 1978, 8TH P INT C EL ION B, P276
- [10] GROBMAN WD, 1979, 15TH P S EL ION LAS