PROXIMITY CORRECTION ENHANCEMENTS FOR 1-MUM DENSE CIRCUITS

被引：14

作者：

GROBMAN, WD

SPETH, AJ

CHANG, THP

机构：

来源：

IBM JOURNAL OF RESEARCH AND DEVELOPMENT | 1980年 / 24卷 / 05期

关键词：

Compendex;

D O I：

10.1147/rd.245.0537

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

LITHOGRAPHY

引用

收藏

页码：537 / 544

页数：8

相关论文

共 26 条

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