STUDY OF ZNTE FILMS GROWN ON GLASS SUBSTRATES USING AN ATOMIC LAYER EVAPORATION METHOD

被引：129

作者：

AHONEN, M ^{[1
]}

PESSA, M ^{[1
]}

SUNTOLA, T ^{[1
]}

机构：

[1] OY LOHJA AB,SF-02100 ESPOO 10,FINLAND

来源：

THIN SOLID FILMS | 1980年 / 65卷 / 03期

关键词：

D O I：

10.1016/0040-6090(80)90240-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：301 / 307

页数：7

共 21 条

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