LANGMUIR PROBE MEASUREMENTS OF AXIAL VARIATION OF PLASMA PARAMETERS IN 27.1 MHZ RF OXYGEN PLANAR DISCHARGES

被引：52

作者：

SABADIL, H

KLAGGE, S

KAMMEYER, M

机构：

来源：

关键词：

D O I：

10.1007/BF01016058

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：425 / 444

页数：20

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