SCANNING AUGER-ELECTRON MICROSCOPY WITH HIGH SPATIAL OR HIGH-ENERGY RESOLUTION

被引：40

作者：

PRUTTON, M

BROWNING, R

ELGOMATI, MM

PEACOCK, D

机构：

来源：

VACUUM | 1982年 / 32卷 / 06期

关键词：

D O I：

10.1016/0042-207X(82)93828-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：351 / 357

页数：7

相关论文

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