STRUCTURAL TRANSFORMATION INDUCED BY NITROGEN IMPLANTATION IN THIN METAL-FILMS

被引：16

作者：

MA, E

LIU, BX

CHEN, X

LI, HD

机构：

来源：

THIN SOLID FILMS | 1987年 / 147卷 / 01期

关键词：

D O I：

10.1016/0040-6090(87)90039-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：49 / 55

页数：7

共 9 条

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[2]

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[3] FORMATION OF CHEMICAL COMPOUNDS BY ION-BOMBARDMENT OF THIN TRANSITION-METAL FILMS [J].

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YANKOVSKII, VM .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1978, 45 (01) :343-352

[4]

DEARNALEY G., 1973, ION IMPLANTATION

[5] WHEN IS THERMODYNAMICS RELEVANT TO ION-INDUCED ATOMIC REARRANGEMENTS IN METALS [J].

JOHNSON, WL ;

CHENG, YT ;

VANROSSUM, M ;

NICOLET, MA .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 7-8 (MAR) :657-665

[6] FACTORS DETERMINING THE COMPOUND PHASES FORMED BY OXYGEN OR NITROGEN IMPLANTATION IN METALS [J].

KELLY, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1982, 21 (03) :778-789

[7]

MA E, 1986, MATERIAL RES SOC S P, V54, P215

[8] IMPLANTATION PHASES IN SOLIDS [J].

PAVLOV, PV .

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[9]

1980, 251133 INT CTR DIFFR

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