THE MECHANISM OF FILM DEPOSITION BY PARTICLE-BEAM INDUCED POLYMERIZATION

被引：4

作者：

FRITZSCHE, CR

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 10期

关键词：

D O I：

10.1149/1.2108355

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：2131 / 2135

页数：5

共 8 条

[1] FORMATION OF THIN POLYMER FILMS BY ELECTRON BOMBARDMENT [J].

CHRISTY, RW .

JOURNAL OF APPLIED PHYSICS, 1960, 31 (09) :1680-1683

[2] CALIBRATION OF A SPINNING ROTOR GAS FRICTION GAUGE AGAINST A FUNDAMENTAL VACUUM PRESSURE STANDARD [J].

COMSA, G ;

FREMEREY, JK ;

LINDENAU, B ;

MESSER, G ;

ROHL, P .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (02) :642-644

[3] CONTROLLED FORMATION OF THIN POLYMER-FILMS BY ELECTRON-IRRADIATION [J].

ELOVIKOV, SS ;

NOVOJILOV, VP ;

USHAKOV, NV .

THIN SOLID FILMS, 1979, 62 (03) :303-316

[4] HIGH-VACUUM GAS FRICTION MANOMETER [J].

FREMEREY, JK .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01) :108-&

[5] TIME CONSTANTS AND REACTION CROSS-SECTIONS CHARACTERIZING FILM DEPOSITION BY BEAM-INDUCED POLYMERIZATION [J].

FRITZSCHE, CR .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (06) :2182-2184

[6] DEPOSITION OF THIN-FILMS BY BEAM INDUCED POLYMERIZATION OF DIVINYL BENZENE [J].

FRITZSCHE, CR .

JOURNAL OF APPLIED PHYSICS, 1982, 53 (12) :9053-9057

[7] POLYMERIZATION OF BUTADIENE GAS ON SURFACES UNDER LOW ENERGY ELECTRON BOMBARDMENT [J].

HALLER, I ;

WHITE, P .

JOURNAL OF PHYSICAL CHEMISTRY, 1963, 67 (09) :1784-&

[8] MATERIALS AND TECHNIQUES USED IN NANOSTRUCTURE FABRICATION [J].

MOLZEN, WW ;

BROERS, AN ;

CUOMO, JJ ;

HARPER, JME ;

LAIBOWITZ, RB .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :269-272

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